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Document Details *PC* [Bookmark] Musee d'Horlogerie Saint-Nicholas d'Aliermont - [Movement image, lime]:

Number of documents found: 1

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• Title: Active damping within an advanced microlithography system using piezoelectric Smart Discs
• Author: Jan Holterman
• Publisher:
  Keywords: -- Copyright: 2004
  Pages: 15 - 34
  Entered By: rah
  BHM No: 15282

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